"Failure mode analysis of MEMS suspended inductors under mechanical shock."

Yiyuan Li, Jianhua Li, Lixin Xu (2018)

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DOI: 10.1016/J.MICROREL.2018.03.041

access: closed

type: Journal Article

metadata version: 2020-02-22

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Yiyuan Li, Jianhua Li, Lixin Xu:
Failure mode analysis of MEMS suspended inductors under mechanical shock. Microelectron. Reliab. 85: 38-48 (2018)

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