"Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive ..."

Prashant Singh et al. (2013)

> Home

Details and statistics

DOI: 10.1007/978-3-642-42024-5_30

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/vdat/SinghSVJ13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/vdat/SinghSVJ13
Prashant Singh, Pooja Srivastava, Ram Mohan Verma, Saurabh Jaiswal:
Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive Accelerometer. VDAT 2013: 249-256

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.