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"Vibration Performance Analysis and Improvement of MEMS Resonant ..."
Yukun Ma et al. (2026)
- Yukun Ma

, Haonan Li
, Yunfeng Liu
, Rong Zhang
, Fengtian Han
:
Vibration Performance Analysis and Improvement of MEMS Resonant Accelerometers. IEEE Trans. Ind. Electron. 73(1): 1449-1458 (2026)

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