"Large-Stroke Microelectrostatic Actuators for Vertical Translation of ..."

Siyuan He, Ridha Ben Mrad (2005)

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DOI: 10.1109/TIE.2005.851682

access: closed

type: Journal Article

metadata version: 2020-05-22

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Siyuan He, Ridha Ben Mrad:
Large-Stroke Microelectrostatic Actuators for Vertical Translation of Micromirrors Used in Adaptive Optics. IEEE Trans. Ind. Electron. 52(4): 974-983 (2005)

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