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"A Post-Routing Layout Optimization Framework for Lithography Process ..."
Yajuan Su et al. (2026)
- Yajuan Su

, Zixi Liu
, Yibo Lin
, Xiaojing Su
, Yuqin Wang, Xin Hong, Yujie Jiang
, Pengyu Ren, Yayi Wei
:
A Post-Routing Layout Optimization Framework for Lithography Process Window Enlargement. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 45(3): 1549-1553 (2026)

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