"SECAM: a supervisory equipment control application model for integrated ..."

Jin-Hwan Lee, Tae-Eog Lee (2004)

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DOI: 10.1109/MRA.2004.1275965

access: closed

type: Journal Article

metadata version: 2020-05-18

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Jin-Hwan Lee, Tae-Eog Lee:
SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment. IEEE Robotics Autom. Mag. 11(1): 41-58 (2004)

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