"Contribution of oxide traps on defect creation and LVSILC conduction in ..."

Damien Zander et al. (2003)

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DOI: 10.1016/S0026-2714(03)00264-6

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type: Journal Article

metadata version: 2022-06-17

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Damien Zander, F. Saigné, A. Meinertzhagen, Christian Petit:
Contribution of oxide traps on defect creation and LVSILC conduction in ultra thin gate oxide devices. Microelectron. Reliab. 43(9-11): 1489-1493 (2003)

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