"Electrostatic discharge failure analysis of capacitive RF MEMS switches."

Jinyu Jason Ruan et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.070

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type: Journal Article

metadata version: 2024-08-04

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Jinyu Jason Ruan, Nicolas Nolhier, Marise Bafleur, Laurent Bary, Fabio Coccetti, T. Lisec, Robert Plana:
Electrostatic discharge failure analysis of capacitive RF MEMS switches. Microelectron. Reliab. 47(9-11): 1818-1822 (2007)

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