"Aging sensors for on-chip metallization of integrated LDMOS transistors ..."

Matthias Ritter, Martin Pfost (2017)

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DOI: 10.1016/J.MICROREL.2017.06.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Matthias Ritter, Martin Pfost:
Aging sensors for on-chip metallization of integrated LDMOS transistors under cyclic thermo-mechanical stress. Microelectron. Reliab. 76-77: 512-516 (2017)

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