"Effect of contact-etch-stop-layer and Si1-xGex ..."

Chang-Chun Lee et al. (2018)

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DOI: 10.1016/J.MICROREL.2017.04.034

access: closed

type: Journal Article

metadata version: 2024-10-06

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Chang-Chun Lee, Chuan-Hsi Liu, Dian-Yong Li, Chia-Ping Hsieh:
Effect of contact-etch-stop-layer and Si_1-xGe_x channel mechanical properties on nano-scaled short channel NMOSFETs with dummy gate arrays. Microelectron. Reliab. 83: 230-234 (2018)

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