"Experimental investigation of temperature and relative humidity effects on ..."

Mohammad Tariq Jan et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.05.007

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mohammad Tariq Jan, Farooq Ahmad, Nor Hisham Hamid, Mohd Haris M. Khir, Muhammad Shoaib, Khalid Ashraf:
Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator. Microelectron. Reliab. 63: 82-89 (2016)

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