"Temperature dependent Young's modulus and quality factor of CMOS-MEMS ..."

Mohammad Tariq Jan et al. (2016)

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DOI: 10.1016/J.MICROREL.2015.12.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mohammad Tariq Jan, Farooq Ahmad, Nor Hisham Hamid, Mohd Haris M. Khir, Khalid Ashraf, Muhammad Shoaib:
Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach. Microelectron. Reliab. 57: 64-70 (2016)

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