"A self-test and dynamics characterization circuit for MEMS electrostatic ..."

Daniel Fernández, Jordi Madrenas, Jordi Cosp (2011)

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DOI: 10.1016/J.MICROREL.2010.09.027

access: closed

type: Journal Article

metadata version: 2022-06-23

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Daniel Fernández, Jordi Madrenas, Jordi Cosp:
A self-test and dynamics characterization circuit for MEMS electrostatic actuators. Microelectron. Reliab. 51(3): 602-609 (2011)

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