"Effect of the pre-gate oxide cleaning temperature on the reliability of ..."

Yen-Ting Chiang et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.08.004

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type: Journal Article

metadata version: 2022-08-23

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Yen-Ting Chiang, Yean-Kuen Fang, Y. J. Huang, Tse-Heng Chou, S. Y. Yeh, C. S. Lin:
Effect of the pre-gate oxide cleaning temperature on the reliability of GOI and devices performances in deep submicron CMOS technology. Microelectron. Reliab. 48(11-12): 1786-1790 (2008)

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