"Facing the defect characterization and localization challenges of bridge ..."

Guillaume Celi et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.115

access: closed

type: Journal Article

metadata version: 2020-02-22

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Guillaume Celi, Sylvain Dudit, Philippe Perdu, Antoine Reverdy, Thierry Parrassin, Emmanuel Bechet, Dean Lewis, Michel Vallet:
Facing the defect characterization and localization challenges of bridge defects on a submicronic technology (45 nm and below). Microelectron. Reliab. 50(9-11): 1499-1505 (2010)

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