"High sensitivity nanostructure incorporated interdigital silicon based ..."

Mahdiyeh Mehran, Shams Mohajerzadeh (2015)

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DOI: 10.1016/J.MEJO.2014.10.008

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mahdiyeh Mehran, Shams Mohajerzadeh:
High sensitivity nanostructure incorporated interdigital silicon based capacitive accelerometer. Microelectron. J. 46(2): 166-173 (2015)

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