"Multi-layer microstructure fabrication by combining bulk silicon ..."

Xiang-meng Jing et al. (2007)

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DOI: 10.1016/J.MEJO.2006.09.003

access: closed

type: Journal Article

metadata version: 2023-02-11

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Xiang-meng Jing, Di Chen, Dong-Ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen:
Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology. Microelectron. J. 38(1): 120-124 (2007)

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