"Simulation and fabrication of HF microelectromechanical bandpass filter."

Ching-Liang Dai, Ming-Chao Chiang, Ming-Wei Chang (2007)

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DOI: 10.1016/J.MEJO.2007.07.070

access: closed

type: Journal Article

metadata version: 2022-10-02

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Ching-Liang Dai, Ming-Chao Chiang, Ming-Wei Chang:
Simulation and fabrication of HF microelectromechanical bandpass filter. Microelectron. J. 38(8-9): 828-833 (2007)

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