"Micro-hotplates for thermal characterisation of structural materials of MEMS."

Péter Csikvári et al. (2009)

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DOI: 10.1016/J.MEJO.2008.05.004

access: closed

type: Journal Article

metadata version: 2023-10-22

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Péter Csikvári, Péter Fürjes, Csaba Dücso, István Bársony:
Micro-hotplates for thermal characterisation of structural materials of MEMS. Microelectron. J. 40(9): 1393-1397 (2009)

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