"Research, design and experiment of end effector for wafer transfer robot."

Yanjie Liu, Meng Xu, Yumei Cao (2012)

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DOI: 10.1108/01439911211192529

access: closed

type: Journal Article

metadata version: 2020-04-16

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Yanjie Liu, Meng Xu, Yumei Cao:
Research, design and experiment of end effector for wafer transfer robot. Ind. Robot 39(1): 79-91 (2012)

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