"Full custom MEMS design: A new method for the analysis of motion-dependent ..."

Axel Hald et al. (2018)

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DOI: 10.1016/J.VLSI.2018.02.004

access: closed

type: Journal Article

metadata version: 2026-05-20

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Axel Hald, Pekka Herzogenrath, Jürgen Scheible, Jens Lienig, Johannes Seelhorst, Peter Brandl:
Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. Integr. 63: 362-372 (2018)

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