"Use of adaptive network fuzzy inference system to predict plasma charging ..."

Byungwhan Kim, Hee Ju Kwon, Seongjin Choi (2009)

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DOI: 10.1016/J.ESWA.2008.07.034

access: closed

type: Journal Article

metadata version: 2017-05-26

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Byungwhan Kim, Hee Ju Kwon, Seongjin Choi:
Use of adaptive network fuzzy inference system to predict plasma charging damage on electrical MOSFET properties. Expert Syst. Appl. 36(3): 6570-6573 (2009)

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