"A real-time wafer lithography area scheduling approach integrating ..."

Lihui Wu et al. (2026)

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DOI: 10.1080/17517575.2026.2616679

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type: Journal Article

metadata version: 2026-03-21

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Lihui Wu, Keshan Jin, Jinming Shi, Jie Zhang, Junliang Wang:
A real-time wafer lithography area scheduling approach integrating transformer with double deep Q-network. Enterp. Inf. Syst. 20(2) (2026)

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