"A Fully-Automated Electron Beam Test System for VLSI Circuits."

Norio Kuji, Teruo Tamama, Takao Yano (1985)

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DOI: 10.1109/MDT.1985.294820

access: closed

type: Journal Article

metadata version: 2021-03-05

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Norio Kuji, Teruo Tamama, Takao Yano:
A Fully-Automated Electron Beam Test System for VLSI Circuits. IEEE Des. Test 2(5): 74-82 (1985)

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