"Multi-step virtual metrology for semiconductor manufacturing: A multilevel ..."

Gian Antonio Susto et al. (2015)

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DOI: 10.1016/J.COR.2014.05.008

access: closed

type: Journal Article

metadata version: 2021-10-14

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Gian Antonio Susto, Simone Pampuri, Andrea Schirru, Alessandro Beghi, Giuseppe De Nicolao:
Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach. Comput. Oper. Res. 53: 328-337 (2015)

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