"A Realizable Overlay Virtual Metrology System in Semiconductor ..."

Tze Chiang Tin et al. (2021)

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DOI: 10.1109/ACCESS.2021.3076193

access: open

type: Journal Article

metadata version: 2021-05-16

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Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang:
A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective. IEEE Access 9: 65418-65439 (2021)

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