"The simulation of integrated tool performance in semiconductor manufacturing."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

John L. Mauer, Roland E. A. Schelasin (1993)

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DOI: 10.1145/256563.256852

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  dblp key:
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  persistent URL:
  - https://dblp.org/rec/conf/wsc/MauerS93
John L. Mauer, Roland E. A. Schelasin:
The simulation of integrated tool performance in semiconductor manufacturing. WSC 1993: 814-818

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