"Analysis of multiple process flows in an ASIC fab with a detailed ..."

Kamil Erkan Kabak, Cathal Heavey, Vincent Corbett (2008)

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DOI: 10.1109/WSC.2008.4736318

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  - https://dblp.org/rec/conf/wsc/KabakHC08
Kamil Erkan Kabak, Cathal Heavey, Vincent Corbett:
Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model. WSC 2008: 2185-2193

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