"Efficient simulations for capacity analysis and automated material ..."

Jesus A. Jimenez, Gerald T. Mackulak, John W. Fowler (2005)

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DOI: 10.1109/WSC.2005.1574501

access: closed

type: Conference or Workshop Paper

metadata version: 2026-05-07

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Jesus A. Jimenez, Gerald T. Mackulak, John W. Fowler:
Efficient simulations for capacity analysis and automated material handling system design in semiconductor wafer fabs. WSC 2005: 2157-2161

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