"Operational Modeling and Simulation in Semiconductor Manufacturing."

John W. Fowler et al. (1998)

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DOI: 10.1109/WSC.1998.745841

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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John W. Fowler, Michael C. Fu, Lee Schruben, Steven Brown, Frank Chance, Sean Cunningham, Courtland Hilton, Mani Janakiram, Richard Stafford, James Hutchby:
Operational Modeling and Simulation in Semiconductor Manufacturing. WSC 1998: 1035

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