"Autonomous Scheduling in Semiconductor Back-End Manufacturing."

Jelle Adan et al. (2022)

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DOI: 10.1109/WSC57314.2022.10015252

access: closed

type: Conference or Workshop Paper

metadata version: 2025-05-01

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Jelle Adan, Alp Akcay, John W. Fowler, Marc Albers, Michael Geurtsen:
Autonomous Scheduling in Semiconductor Back-End Manufacturing. WSC 2022: 3489-3500

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