"Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure ..."

Luiz Antonio Rasia et al. (2017)

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DOI: 10.1007/978-3-319-66963-2_39

access: closed

type: Conference or Workshop Paper

metadata version: 2022-05-18

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  - conf/wea2/RasiaLKFMF17
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Luiz Antonio Rasia, Gabriela Leal, Leandro Léo Koberstein, Humber Furlan, Marcos Massi, Mariana Amorim Fraga:
Design and Analytical Studies of a DLC Thin-Film Piezoresistive Pressure Microsensor. WEA 2017: 433-443

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