"First Demonstration of BEOL-Compatible 3D Vertical FeNOR."

Yang Feng et al. (2024)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46783.2024.10631352

access: closed

type: Conference or Workshop Paper

metadata version: 2025-03-03

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Yang Feng, Dong Zhang, Chen Sun, Zijie Zheng, Yue Chen, Qiwen Kong, Gan Liu, Yuye Kang, Kaizhen Han, Zuopu Zhou, Gengchiau Liang, Kai Ni, Jixuan Wu, Jiezhi Chen, Xiao Gong:
First Demonstration of BEOL-Compatible 3D Vertical FeNOR. VLSI Technology and Circuits 2024: 1-2

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