"Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching."

Sandeep Singh Chauhan et al. (2018)

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DOI: 10.1007/978-981-13-5950-7_22

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Sandeep Singh Chauhan, Niharika J, M. M. Joglekar, Sanjeev Kumar Manhas:
Fabrication of Molybdenum MEMs Structures Using Dry and Wet Etching. VDAT 2018: 254-263

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