"Fabrication and characterization of Al gate n-MOSFET, on-chip fabricated ..."

Rekha Chaudhary et al. (2015)

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DOI: 10.1109/ISVDAT.2015.7208083

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Rekha Chaudhary, Amit Sharma, Soumendu Sinha, Jitendra Yadav, Rishi Sharma, Ravindra Mukhiya, Vinod K. Khanna:
Fabrication and characterization of Al gate n-MOSFET, on-chip fabricated with Si3N4 ISFET. VDAT 2015: 1-4

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