"Impact of Dummy Poly on the Process-Induced Mechanical Stress Enhanced ..."

Naushad Alam, Bulusu Anand, Sudeb Dasgupta (2012)

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DOI: 10.1007/978-3-642-31494-0_43

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-05

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Naushad Alam, Bulusu Anand, Sudeb Dasgupta:
Impact of Dummy Poly on the Process-Induced Mechanical Stress Enhanced Circuit Performance. VDAT 2012: 357-359

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