"Non-contact Mode SPM System Design by Integrating MEMS Electro-static ..."

Jium-Ming Lin, Chun-Chieh Lin (2006)

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DOI: 10.1109/ICSMC.2006.384870

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Jium-Ming Lin, Chun-Chieh Lin:
Non-contact Mode SPM System Design by Integrating MEMS Electro-static Micro-probe & Laser Doppler Interferometer. SMC 2006: 4591-4596

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