"Design and fabrication of a multi-degree-of-freedom microactuator using ..."

Sheng-Chih Shen et al. (2012)

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DOI: 10.1109/SII.2012.6427389

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-16

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Sheng-Chih Shen, Shyang-Jye Chang, Cheng-Tang Pan, J. C. Huang, P. C. Tsai:
Design and fabrication of a multi-degree-of-freedom microactuator using symmetric piezoelectric pusher element and its applications. SII 2012: 686-691

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