"Evaluation of positioning control system using relative displacement ..."

Hironori Ogawa et al. (2016)

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DOI: 10.1109/SII.2016.7844079

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Hironori Ogawa, Yukinori Kobayashi, Kougen Kageyama, Takanori Emaru, Masaki Odai:
Evaluation of positioning control system using relative displacement observer for precise positioning stages. SII 2016: 688-693

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