"Research on High Precision Micro-assembly Technology for Automated MEMS ..."

Yongtao Jiang et al. (2018)

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DOI: 10.1109/ROBIO.2018.8665140

access: closed

type: Conference or Workshop Paper

metadata version: 2019-03-29

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Yongtao Jiang, Shanshan Feng, Haibo Huang, Liguo Chen:
Research on High Precision Micro-assembly Technology for Automated MEMS Thermopile Chip Die Bonding Process. ROBIO 2018: 2409-2414

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