"Micromechanical accelerometers based on surface acoustic waves."

Dmitry Lukyanov et al. (2014)

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DOI: 10.1109/NORCHIP.2014.7004701

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Dmitry Lukyanov, Sergey Yu. Shevchenko, Alexander S. Kukaev, E. Filippova, D. Safronov:
Micromechanical accelerometers based on surface acoustic waves. NORCHIP 2014: 1-4

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