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"Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic ..."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Xiaoshan Zheng et al. (2011)

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DOI: 10.1109/NEMS.2011.6017466

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  dblp key:
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Xiaoshan Zheng, Xin Yan, Zijun Song, Haisheng San, Xuyuan Chen:
Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic package and electrical interconnecting. NEMS 2011: 764-767

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