"The Test Structures to Measure Resistivity and Contact Resistance of ..."

Sen Zhang, Xiaoping Liao (2019)

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DOI: 10.1109/NEMS.2019.8915618

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-09

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Sen Zhang, Xiaoping Liao:
The Test Structures to Measure Resistivity and Contact Resistance of Poly-Si for Thermoelectric-Photoelectric Integrated Generator. NEMS 2019: 443-446

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