"Precise width control of single crystalline silicon nano-wall structure ..."

Xiao Yu et al. (2012)

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DOI: 10.1109/NEMS.2012.6196774

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xiao Yu, Qinhua Jin, Tie Li, Yuelin Wang:
Precise width control of single crystalline silicon nano-wall structure based on wet etching process on (111) wafer. NEMS 2012: 278-281

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