"Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back ..."

Zhenjun Wang et al. (2018)

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DOI: 10.1109/NEMS.2018.8556920

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Zhenjun Wang, Zhenxiang Yi, Yizhou Ye, Ming Qin, Qing-An Huang:
Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back Surface Sensing Mode. NEMS 2018: 640-643

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