"A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors."

Jiankun Wang, Zhenchuan Yang, Guizhen Yan (2012)

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DOI: 10.1109/NEMS.2012.6196843

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-23

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Jiankun Wang, Zhenchuan Yang, Guizhen Yan:
A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors. NEMS 2012: 583-586

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