"Fabrication Process and Performance Analysis of AlN based Piezoelectric ..."

Li Wang et al. (2019)

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DOI: 10.1109/NEMS.2019.8915602

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-09

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Li Wang, Yihsiang Chiu, Dan Gong, Shenglin Ma, Yang Yang, Heng Li, Hungping Lee, Huguang Liu, Yufeng Jin:
Fabrication Process and Performance Analysis of AlN based Piezoelectric Micromachined Ultrasonic Transducer with a Suspended Structure. NEMS 2019: 514-519

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