"Effect of Shared Cavity on Electromechanical Performance of Piezoelectric ..."

Weili Wang et al. (2019)

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DOI: 10.1109/NEMS.2019.8915657

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-09

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Weili Wang, Yihsiang Chiu, Dan Gong, Shenglin Ma, Wen Lei, Hungping Lee, Huguang Liu, Yufeng Jin:
Effect of Shared Cavity on Electromechanical Performance of Piezoelectric Based Micro-machined Ultrasonic Transducer Array. NEMS 2019: 482-487

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