"Nanometer-scale flatness and reliability investigation of ..."

Mikael Sterner, Göran Stemme, Joachim Oberhammer (2010)

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DOI: 10.1109/NEMS.2010.5592249

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-13

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Mikael Sterner, Göran Stemme, Joachim Oberhammer:
Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes. NEMS 2010: 959-962

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