"A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb ..."

Ziyang Song, Jian Cui, Qiancheng Zhao (2019)

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DOI: 10.1109/NEMS.2019.8915674

access: closed

type: Conference or Workshop Paper

metadata version: 2019-12-09

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Ziyang Song, Jian Cui, Qiancheng Zhao:
A Silicon Resonant Accelerometer with Vibrating Beam Integrated with Comb Fingers Sensing Structure. NEMS 2019: 477-481

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